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Senior Director of Facilities

Onto Innovation
Full Timedirector
Wilmington-MA (Jonspin)Posted Yesterday

Role Overview

Onto Innovation is hiring a Senior Director of Facilities. This is a full-time role in Wilmington-MA (Jonspin). posted yesterday. Full responsibilities, required qualifications, and the apply link are listed in the description below.

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ROIORStakeholder ManagementCompensationBenefitsKPIsComplianceOnto

Job description

Onto Innovation is a leader in process control, combining global scale with an expanded portfolio of leading-edge technologies that include: 3D metrology spanning the chip from nanometer-scale transistors to micron-level die-interconnects; macro defect inspection of wafers and packages; metal interconnect composition; factory analytics; and lithography for advanced semiconductor packaging. Our breadth of offerings across the entire semiconductor value chain helps our customers solve their most difficult yield, device performance, quality, and reliability issues. Onto Innovation strives to optimize customers’ critical path of progress by making them smarter, faster and more efficient.

Job Summary & Responsibilities

We are currently looking for a facilities Director to join the Global Facilities management team. This is a position where the successful candidate will serve as the organization's subject matter expert in the facilities domain for the semiconductor equipment manufacturing industry. This individual will be responsible for planning, design coordination, project implementation and operations centering on the western United States and Asia. This person will also be expected to promote a positive image for Onto with stakeholders: employees, customers, investors, local communities, and government agencies.

Responsibilities:

  • Managing large construction projects. Job involves managing design and construction of new clean room and offices as well as upgrading of existing buildings
  • Evaluation of existing versus new energy-efficient technologies to reduce operating costs, etc.
  • Implement and ensure equipment maintenance programs are in place; ensure all maintenance is being completed per the maintenance schedules
  • Respond to Facilities Systems abnormal operating conditions or facilities systems down
  • Ensure Facilities equipment/systems uptime requirements (KPIs) are met or exceeded
  • Collect and analyze facilities system operational data to solve operational issues and/or to develop system performance improvement projects/solutions.
  • Evaluate Facilities Dept. system operational risk areas and propose solutions and projects to reduce risks and improve system/equipment uptime and robustness.
  • Lead/support in advanced system/equipment troubleshooting knowledge
  • Support Facilities System/Equipment Expansion projects with design review, system start-up and system commissioning work.
  • Preparation of bid/RFQ documents, soliciting and evaluating bids
  • Preparing purchase requests, ROI calculations and developing/presenting executive summaries and proposals
  • Flexibility in working hours/days in supporting the Facilities Department operations and maintenance including holiday shutdowns and weekends.
  • Experience with hiring excellent talent, developing personnel and conduct periodic performance reviews
  • Interfacing with various governmental agencies; Coordinating with contractors and city inspectors
  • Other facilities operations and engineering duties as assigned

Qualifications

  • Bachelor’s degree in mechanical engineering or equivalent
  • Minimum of 15 years of experience in facility operations and the semiconductor industry
  • Operations expertise with multiple systems and equipment types found in the semiconductor manufacturing industry. Specific operations experience in several of the following facilities areas is required:
    • Process Exhaust systems and exhaust scrubbers
    • Clean room HVAC (Makeup Air Units, recirc air fans, cooling coils, etc.)
    • Clean room architectural systems (Walls, FFUs, temperature/humidity control)
    • Chillers & Chilled water distribution systems
    • Cooling Towers
    • Boilers & hot water distribution systems
    • Bulk Gases (LN2, LH2, LO2)
    • Wastewater Treatment Systems
    • Electrical (12.5kV & 480v distribution, transformers, UPS)
    • Life Safety Systems (VESDA, Toxic Gas monitoring, Fire Alarm systems)
    • Control systems and field instruments
    • Ultra-Pure Water System
    • High Purity Bulk Chemical Delivery systems design, operations, and maintenance.
  • Experience in managing maintenance projects within a semiconductor facilities department. Experience with - scoping, budget/cost estimation, resource planning, schedule creation, stakeholder management.
  • Advanced mechanical, electrical and control system troubleshooting skills for various semiconductor facilities systems and equipment types.
  • Ability to interface and manage outside contractors for daily operations and maintenance projects for all facilities systems and building systems.
  • Ability to work in an industrial plant/facilities environment wearing the prescribed personal protective equipment (PPE) for hearing, chemical protection and fall protection. Ability to work off ladders and scaffolding, and be able to lift 50 lbs.
  • Ability to work and create a collaborative and team focused environment and is self-managed.

Why Join Onto Innovation?

At Onto Innovation, we believe your work should matter—and so should your well-being. That’s why we offer competitive salaries and a comprehensive benefits package designed to support you and your family. From health, dental, and vision coverage to life and disability insurance, PTO, and a 401(k) with employer match, we’ve got you covered. You’ll also enjoy access to our Employee Stock Purchase Program (ESPP), wellness initiatives, and cutting-edge tools—all within a collaborative, inclusive culture where your contributions are valued and recognized.

Compensation & Growth

• Base Salary Range:

$155,200.00 - $232,800.00, offered in good faith and based on experience, location, and qualifications.

  • Additional Rewards: Annual bonus opportunities and potential long-term incentives tied to both company and individual success.

Empowering Every Voice to Shape the Future:

Onto Innovation is committed to creating a workplace where every qualified candidate has an equal opportunity to succeed. We evaluate applicants based on skills, experience, and potential - without regard to race, color, religion, gender, sexual orientation, national origin, age, disability, veteran status, or any other characteristic protected by law. We believe diversity of thought and background drives innovation and strengthens our team.

Important Note on Export Compliance

For certain positions requiring access to technical data, U.S. export licensing review may be necessary for applicants who are not U.S. Citizens, Permanent Residents, or other protected persons under 8 U.S.C. 1324b(a)(3).

About Onto Innovation

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Onto Innovation

ontoinnovation.com

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Frequently Asked Questions

How do I apply for the Senior Director of Facilities position at Onto Innovation?

Use the Apply button above to submit your application directly to Onto Innovation. Most applications take less than 5 minutes if your resume and contact details are ready, and you'll be routed to the employer's official application system to finish.

Where is the Senior Director of Facilities position at Onto Innovation located?

This position is based in Wilmington-MA (Jonspin). Onto Innovation has not indicated remote or hybrid options for this role, so candidates should plan for on-site work.

What does a Senior Director of Facilities at Onto Innovation earn?

Onto Innovation has not disclosed a salary range in this posting. Many employers share specifics later in the interview process; you can also ask during a recruiter screen if compensation transparency is important to you.

When was the Senior Director of Facilities role at Onto Innovation posted?

This role was posted on July 21, 2026 (yesterday). It's still listed as actively hiring; we re-confirm openings against the source system multiple times per day and remove closed roles.

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